Funding resources and rates
Microsystems Hub
Funding resources
CNC Microsystems MNT Award
Covers up to 80 per cent of custom microfabrication projects at open-access facilities like ours.
NSERC research grants
Partner with us on research through an NSERC Alliance Grant.
Microsystems Hub rates
If you're already funded, we offer your research project fee-for-service access to our equipment and services.
| Equipment | Academic | Industrial |
| 4-Point-Probe (Ossilla) | $ 25.00 | $ 60.00 |
| Atomic Force Microscope (nGauge) | $ 30.00 | $ 75.00 |
| Basic Optical Microscope (Class 100) | $ 15.00 | $ 40.00 |
| Business Development/Tech Support/CAD Development | $ 65.00 | $ 100.00 |
| Calibrated Imaging/Measurement Microscope | $ 30.00 | $ 60.00 |
| 150W CO2 Laser System (BOSSLaser) | $ 25.00 | $ 35.00 |
| Multi-Source Plasma Sputterer (Angstrom) | $ 40.00 | $ 100.00 |
| Desktop SEM | $ 40.00 | $ 100.00 |
| Maskless Writer | $ 25.00 | $ 60.00 |
| Stylus Profilometer | $ 35.00 | $ 90.00 |
| CNC Milling mahcine | $ 15.00 | $ 40.00 |
| Convection Oven (Boekel 107801) | $ 20.00 | $ 55.00 |
| Critical Point Dryer (Tousimis) | $ 40.00 | $ 90.00 |
| Desktop Plasma Sputter (Denton) (currently offline) | $ 25.00 | $ 65.00 |
| Dicing Saw with Wafer Mounter (Disco DAD123) | $ 50.00 | $ 100.00 |
| E-Beam Evaporator (Denton) – Currently Offline | $ 50.00 | $ 100.00 |
| Electroplating System with Wet Deck | $ 40.00 | $ 100.00 |
| Femtosecond Laser System | $ 25.00 | $ 35.00 |
| HMDS Oven (YES-310TA) | $ 25.00 | $ 55.00 |
| ICP Reactive Ion Etching - Trion (currently offline) | $ 40.00 | $ 100.00 |
| Muffle Furnace (Thermo Scientific FB1415M) | $ 20.00 | $ 55.00 |
| Multi-Source Plasma Sputterer (KJL CMS-18) | $ 40.00 | $ 100.00 |
| Non-Standard Coatings Station (Laurell) | $ 65.00 | $ 100.00 |
| Optical Profilometer (Wyko Veeco NT1100) | $ 35.00 | $ 55.00 |
| Orientation | $ 90.00 | $ 100.00 |
| Photolithography Mask Aligner (SUSS MA/BA6) | $ 40.00 | $ 95.00 |
| Photolithography Suite (Spin, Bake, Expose, Develop) | $ 100.00 | $ 175.00 |
| Photoresist Spin Coating (Laurell) | $ 35.00 | $ 100.00 |
| Physical Stylus Profilometer (Tencor P6) | $ 35.00 | $ 90.00 |
| Reflectometry Thin Film Measurement (Nanometrics) | $ 20.00 | $ 55.00 |
| Spin Rinse Dryer | $ 15.00 | $ 30.00 |
| Training | $ 65.00 | $ 100.00 |
| Vacuum Chamber Sealing Station | $ 15.00 | $ 30.00 |
| Wet Deck (Class 100) | $ 40.00 | $ 100.00 |
| Wet Deck (KOH) | $ 45.00 | $ 100.00 |