Funding resources and rates
Microsystems Hub
Funding resources
CNC Microsystems MNT Award
Covers up to 80 per cent of custom microfabrication projects (Up to $4000) at open-access facilities like ours.
NSERC research grants
Partner with us on research through an NSERC Alliance Grant.
Microsystems Hub rates
If you're already funded, we offer your research project fee-for-service access to our equipment and services below.
1. Non-U of C academic and industrial work is subject to a 45% U of C overhead fee.
2. Entry Fee covers 4 hours of consecutive equipment booking
3. Photolithography Suite includes Standard spin coater, wet deck, and the mask aligner.
Technique | Instrument Model | UofC Rate ($/hr) | Academic Rate ($/hr)1 | Industrial Rate ($/hr)1 |
|---|---|---|---|---|
Technician Time |
| 50 | 50 | 100 |
Entry Fee2 |
| 20 | 20 | 20 |
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SEM | Phenom Pro | 40 | 40 | 100 |
Calibrated Imaging and Measurement Microscope | Mitutoyo FS1100 Optical | 30 | 30 | 75 |
AFM | nGauge | 30 | 30 | 75 |
Optical Profilometer | NT1100 Veeco | 30 | 30 | 75 |
Physical Profilometer | Dektak | 30 | 30 | 75 |
4-Point-Probe | Osilla | 25 | 25 | 60 |
Thin Film Measurement | Nanometrics | 20 | 20 | 55 |
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Sputtering | CMS-18 Lesker | 40 | 40 | 100 |
Sputtering | Angstrom Nex-Dep | 40 | 40 | 100 |
Standard Resist Spin Coater | Laurell | 35 | 35 | 80 |
Non-Standard Spin Coater | Laurell | 50 | 50 | 100 |
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Laser Fabrication | BOSS Laser | 25 | 25 | 50 |
Laser Fabrication | Spectra-Physics Femtosecond | 25 | 25 | 50 |
ICP Reactive Ion Etch | Trion RIE | 40 | 40 | 100 |
CNC Milling |
| 15 | 15 | 40 |
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Maskless Writer | Heidelberg uMLA | 25 | 25 | 70 |
Mask Aligner | SUSS MA/BA6 | 40 | 40 | 100 |
Wet Deck |
| 40 | 40 | 100 |
Photolithography Suite3 |
| 100 | 100 | 225 |
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Critical Point Dryer | Tousmis | 40 | 40 | 100 |
Dicing Saw + Wafer Mounter | DISCO DAD3221 | 50 | 50 | 100 |
Spin Rinse Dryer |
| 15 | 15 | 30 |
Wirebonder | F&S | 45 | 45 | 100 |
HMDS Oven | YES-310TA | 25 | 25 | 55 |