Teaching and research results

Microsystems Hub

Micro/Nano System Design, Fabrication and Integration

Techniques for the fabrication of micro/nano systems, including ultra-thin films and multilayers. Industry-standard metrology techniques and technologies for characterization of the structure, chemistry and properties of micro/nano materials and devices. Fundamental fabrication technologies including bulk micromachining, surface micromachining and commercial methods. Bonding and packaging issues related to the micro/nano scale.


Course hours: 3 units

Microsystems Hub research partner FREDsense

Research success story

FREDsense builds field kits that make water quality analysis faster, cheaper and more efficient. FREDsense worked with the Microsystems Hub on its R&D in 2017-18 as part of an Engage Grant. In addition to the launch of the resulting technologies, the company also recently secured $2.5 million in funding from BDC Capital.