Microsystems Hub

A high-tech machine shop for micro- and nano-scale technology fabrication

Who are we?

Our clients

For small businesses and academics alike, access to a high-level cleanroom, advanced equipment and micro/nanotechnology prototyping is rare - and expensive. An affordable answer is right here in Calgary.

A unique resource

One of only two such open-access facilities in Alberta and about 20 in the country, the Microsystems Hub in the Schulich School of Engineering has $8 million in specialized equipment for micro- and nano-fabrication and characterization.

What we do

Opened in 2005, we support micro/nanotechnology prototyping by academia and industry. As an open-access facility, we provide cost-effective, low-volume, specialized research and development services.

Consult with our experts and advance your promising innovations towards commercial production!

Read our brochure!

 


 

We gratefully acknowledge financial support for our operation and equipment from Alberta Innovates, NSERC, CIHR and CFI.

Financing your work with us

Research grants

Fee-for-service access

Financial assistance

Research areas we support

RF/microwave cancer detection
Implantable sensors
Brain neuron stimulation/recording
Optics and optical components
Digital cytometry
Integrated CMOS sensors
Muscle interactions with silicon cantilevers
Controlled placement of nanoparticles
Microneedles, microfluidics and micropumps
Square kilometer array
MEMS and BioMEMS
Reservoir micromodels
3D surface analysis
Fuel cells


Cleanrooms and equipment

Cleanrooms

Class 100

This cleanroom contains pristine air - no more than 100 particles (.5+ microns) per cubic metre. The air we breath in a typical urban environment has 300,000 particles per cubic metre. Access our main wet-processing area and a controlled, yellow-light environment - for light-sensitive materials and photolithography.

Class 1,000

Access a range of integration, coating, patterning, dicing and inspection tools. This includes both contact and non-contact profilometry, flip chip integration and thin film deposition. Additional wet processing and dry-etching facilities are also available.

Equipment and services

Metrology and inspection

  • Mitutoyo FS110 optical microscope with image capture (3D capability)
  • Nikon Optiphot inspection microscope
  • M-gauge metallization thickness monitor
  • Nanometrics thin-film analysis tool
  • 3D rendering PC station
  • Stereo microscope

Integration and packaging

  • SET FC-150 Flip-Chip Bonder
  • Vacuum sealing station
  • Stratasys 3D printer

Photolithography and wet processing

  • SUSS MA/BA6 front and back mask aligner
  • 4-foot polycarbonate KOH wet deck
  • 8-foot polycarbonate multipurpose wet deck
  • 4-foot stainless steel non-standard materials wet deck
  • 6-foot stainless steel multipurpose wet deck

Coating

  • 2 multipurpose Laurell spin coaters
  • Kurt J. Lesker CMS-18 multi-source sputtering system
  • Denton Infinity multi-source electron-beam evaporator
  • Denton Desktop sputtering system
  • Dry film laminator

Dry-etching

  • Trion reactive ion etcher with inductively coupled plasma source
  • Specta-Physics femtosecond laser micro-machining system

Substrate preparation and storage

  • Ultrasonic cleaning station
  • Dump rinser
  • Critical point dryer
  • YES HMDS oven
  • Small oven
  • Semitool spin-rinse dryer
  • Nitrogen storage cabinet
  • Thermolyne Benchtop 1100 C Muffle Furnace, 1.3 litre capacity
  • Disco DAD 321 dicing saw

Femtosecond laser material processing (FLMP)

  • Custom-built FLMP (2.5 W, 1kHz, 100 fs)
  • Accurate and precise motion control over a 170 mmarea
  • Fabricates micro-and nano-technology systems not easily developed with traditional methods
  • High-precision laser beam
  • Machines complex patterns with a CNC motion 
  • Eliminates need for expensive photomasks, chemical etching or high vacuum systems
  • Fast processing speed